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Materials, technology and reliability for advanced interconnects and low-k dielectrics--2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A /

Bibliographic Details
Corporate Authors: Materials Research Society. Fall Meeting, Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Other Authors: Carter, R. J. (Richard John), 1948-
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2004]
Series:Materials Research Society symposia proceedings ; v. 812.
Subjects:
Semiconductors > Materials > Congresses.
Semiconductors > Junctions > Congresses.
Dielectric films > Congresses.
Integrated circuits > Materials > Congresses.
Integrated circuits > Reliability > Congresses.
Description
Item Description:"This proceedings volume contains 60 papers presented at Symposium F, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics, ' which was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--P. xiii.
Physical Description:xiii, 402 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558997628