Materials, technology and reliability for advanced interconnects and low-k dielectrics--2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Other Authors:	Carter, R. J. (Richard John), 1948-
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2004]
Series:	Materials Research Society symposia proceedings ; v. 812.
Subjects:	Semiconductors > Materials > Congresses. Semiconductors > Junctions > Congresses. Dielectric films > Congresses. Integrated circuits > Materials > Congresses. Integrated circuits > Reliability > Congresses.

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