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Intrinsic point defects, impurities, and their diffusion in silicon /

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Bibliographic Details
Main Author: Pichler, P. (Peter)
Format: Book
Language:English
Published: Wien ; New York : Springer, [2004]
Series:Computational microelectronics.
Subjects:
Silicon crystals > Defects.
Semiconductors > Diffusion.
Description
Physical Description:xxi, 554 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 526-536) and index.
ISBN:3211206876 (hd.bd.)
ISSN:0179-0307