Cover Image

MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Urey, Hakan, 1970-, El-Fatatry, Ayman
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5455.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Micromachining > Congresses.
Description
Physical Description:xi, 438 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819453781