MEMS, MOEMS, and micromachining : 29-30 April 2004, Strasbourg, France /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Urey, Hakan, 1970-, El-Fatatry, Ayman
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5455.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses. Micromachining > Congresses.

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