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Microprocesses and nanotechnology 2003 : digest of papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan /

Bibliographic Details
Corporate Authors: International Microprocesses and Nanotechnology Conference Tokyo, Japan, IEEE Electron Devices Society, Ōyō Butsuri Gakkai, American Vacuum Society
Format: Conference Proceeding eBook
Language:English
Published: Tokyo, Japan : Business Center for Academic Societies Japan, [2003]
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Lithography > Congresses.
Nanotechnology > Congresses.
Microelectronics > Congresses.
Online Access:Restricted to IEEE Xplore subscribers
Description
Item Description:Contains advertising material.
"JSAP CAT. Number JSAP031240 ; IEEE Catalog Number 03EX738"--Title page verso.
Conference number extrapolated.
Physical Description:xxv, 349 pages, 8 unnumbered pages : illustrations ; 28 cm.
Also available via the World Wide Web.
Bibliography:Includes bibliographical references and author index.
ISBN:4891140402