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Microprocesses and nanotechnology 2003 : digest of papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan /

Bibliographic Details
Corporate Authors: International Microprocesses and Nanotechnology Conference Tokyo, Japan, IEEE Electron Devices Society, Ōyō Butsuri Gakkai, American Vacuum Society
Format: Conference Proceeding eBook
Language:English
Published: Tokyo, Japan : Business Center for Academic Societies Japan, [2003]
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Lithography > Congresses.
Nanotechnology > Congresses.
Microelectronics > Congresses.
Online Access:Restricted to IEEE Xplore subscribers

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Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: QC176.8.M5 I58 2003
 
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QC176.8.M5 I58 2003 Available