APA (7th ed.) Citation

International Microprocesses and Nanotechnology Conference Tokyo, Japan, IEEE Electron Devices Society, Ōyō Butsuri Gakkai, & American Vacuum Society. (2003). Microprocesses and nanotechnology 2003: Digest of papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan. Business Center for Academic Societies Japan.

Chicago Style (17th ed.) Citation

International Microprocesses and Nanotechnology Conference Tokyo, Japan, IEEE Electron Devices Society, Ōyō Butsuri Gakkai, and American Vacuum Society. Microprocesses and Nanotechnology 2003: Digest of Papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan. Tokyo, Japan: Business Center for Academic Societies Japan, 2003.

MLA (9th ed.) Citation

International Microprocesses and Nanotechnology Conference Tokyo, Japan, et al. Microprocesses and Nanotechnology 2003: Digest of Papers : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan. Business Center for Academic Societies Japan, 2003.