Cover Image

Enabling technology for MEMS and nanodevices /

Bibliographic Details
Other Authors: Baltes, H. (Henry)
Format: Book
Language:English
Published: Weinheim [Germany] : Wiley-VCH, [2004]
Series:Advanced micro & nanosystems ; v. 1.
Subjects:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Description
Physical Description:xii, 427 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:352730746X (hd.bd.)