Enabling technology for MEMS and nanodevices /

Bibliographic Details

Other Authors:	Baltes, H. (Henry)
Format:	Book
Language:	English
Published:	Weinheim [Germany] : Wiley-VCH, [2004]
Series:	Advanced micro & nanosystems ; v. 1.
Subjects:	Microelectromechanical systems. Microelectronics. Nanotechnology.