Baltes, H. (2004). Enabling technology for MEMS and nanodevices. Wiley-VCH.
Chicago Style (17th ed.) CitationBaltes, H. Enabling Technology for MEMS and Nanodevices. Weinheim [Germany]: Wiley-VCH, 2004.
MLA (9th ed.) CitationBaltes, H. Enabling Technology for MEMS and Nanodevices. Wiley-VCH, 2004.
Warning: These citations may not always be 100% accurate.