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Introduction to microfabrication /

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Bibliographic Details
Main Author: Franssila, Sami
Format: Book
Language:English
Published: Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, [2004]
Subjects:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Online Access:Table of contents
Publisher description
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by Franssila, Sami
Published 2010
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