Introduction to microfabrication /

Bibliographic Details

Main Author:	Franssila, Sami
Format:	Book
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, [2004]
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication.
Online Access:	Table of contents Publisher description