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Introduction to microfabrication /

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Bibliographic Details
Main Author: Franssila, Sami
Format: Book
Language:English
Published: Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, [2004]
Subjects:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
Online Access:Table of contents
Publisher description
Description
Physical Description:xvii, 401 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0470851058 (cloth)
9780470851050 (cloth)
0470851066 (pbk.)
9780470851067 (pbk.)