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| LEADER |
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| 001 |
in00001842913 |
| 005 |
20151026075818.0 |
| 008 |
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| 020 |
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|a (OCoLC)ocm55482782
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|a LHL
|c LHL
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| 049 |
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|a TXAM
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| 090 |
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|a TS183
|b .D38 2004
|
| 245 |
0 |
0 |
|a Data analysis and modeling for process control :
|b 26-27 February 2004, Santa Clara, California, USA /
|c Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.
|
| 264 |
|
1 |
|a Bellingham, Washington :
|b SPIE,
|c [2004]
|
| 264 |
|
4 |
|c ©2004
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| 300 |
|
|
|a xxx, 248 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 5378
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Manufacturing processes
|x Mathematical models
|v Congresses.
|
| 650 |
|
0 |
|a Manufacturing processes
|x Automatic control
|v Congresses.
|
| 650 |
|
0 |
|a Intelligent control systems
|x Mathematical models
|v Congresses.
|
| 650 |
|
0 |
|a Process control
|x Mathematical models
|v Congresses.
|
| 700 |
1 |
|
|a Tobin, Kenneth W.
|
| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers.
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| 710 |
2 |
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|a Semiconductor Equipment and Materials International.
|
| 710 |
2 |
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|a International SEMATECH.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 5378.
|
| 948 |
|
|
|a cataloged
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