APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, International SEMATECH, & Tobin, K. W. (2004). Data analysis and modeling for process control: 26-27 February 2004, Santa Clara, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, International SEMATECH, and Kenneth W. Tobin. Data Analysis and Modeling for Process Control: 26-27 February 2004, Santa Clara, California, USA. Bellingham, Washington: SPIE, 2004.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Data Analysis and Modeling for Process Control: 26-27 February 2004, Santa Clara, California, USA. SPIE, 2004.