MOEMS and miniaturized systems IV : 27-28 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	El-Fatatry, Ayman
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5346.
Subjects:	Microelectromechanical systems > Congresses. Miniature electronic equipment > Congresses. Micromechanics > Congresses. Optics, Adaptive > Congresses. Optical scanners > Congresses.

Remote Storage