Society of Photo-optical Instrumentation Engineers, Janson, S. W., & Henning, A. K. (2004). MEMS/MOEMS components and their applications: 26-27 January 2004, San Jose, California, USA. SPIE.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers, Siegfried W. Janson, and Albert Karl Henning. MEMS/MOEMS Components and Their Applications: 26-27 January 2004, San Jose, California, USA. Bellingham, Washington: SPIE, 2004.
MLA (9th ed.) CitationSociety of Photo-optical Instrumentation Engineers, et al. MEMS/MOEMS Components and Their Applications: 26-27 January 2004, San Jose, California, USA. SPIE, 2004.
Warning: These citations may not always be 100% accurate.