MEMS/MOEMS components and their applications : 26-27 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Janson, Siegfried W., Henning, Albert Karl
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5344.
Subjects:	Microelectromechanical systems > Congresses. Optoelectronic devices > Congresses.

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