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Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Perez-Maher, Mary Ann, Jakubczak, Jerome Florian
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5342.
Subjects:
Micromachining > Congresses.
Microfabrication > Congresses.
Electromechanical devices > Design and construction > Congresses.
Online Access:https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5342.toc
Description
Physical Description:xxii, 276 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819452505