Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Perez-Maher, Mary Ann, Jakubczak, Jerome Florian
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5342.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5342.toc

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