Influence of substrate temperature and hydrogen dilution ration on the properties of nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition : preprint /

Bibliographic Details
Corporate Author: National Renewable Energy Laboratory (U.S.)
Other Authors: Moutinho, Helio R.
Format: Government Document Book
Language:English
Published: Golden, Colo. : National Renewable Energy Laboratory, [2003]
Series:Conference paper ; NREL/CP-520-33929
Subjects:
Online Access:https://purl.fdlp.gov/GPO/LPS49135
Description
Item Description:Title from title screen (viewed on May 18, 2004).
Electronic resource.
Format:Mode of access: Internet from the NREL web site. Address as of 5/18/04: http://www.nrel.gov/docs/fy03osti/33929.pdf; current access available via PURL.