Influence of substrate temperature and hydrogen dilution ration on the properties of nanocrystalline silicon thin films grown by hot-wire chemical vapor deposition : preprint /
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| Format: | Government Document Book |
| Language: | English |
| Published: |
Golden, Colo. :
National Renewable Energy Laboratory,
[2003]
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| Series: | Conference paper ;
NREL/CP-520-33929 |
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| Online Access: | https://purl.fdlp.gov/GPO/LPS49135 |
Internet
https://purl.fdlp.gov/GPO/LPS49135Available Online
| Call Number: |
E 9.17:NREL/CP-520-33929 |
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| Call Number | Status | Get It |
| E 9.17:NREL/CP-520-33929 | Available | |