Selected papers on resolution enhancement techniques in optical lithography /

Bibliographic Details
Other Authors:	Schellenberg, F. M., 1959-
Format:	Book
Language:	English German Japanese
Published:	Bellingham, Wash. : SPIE Press, [2004]
Series:	SPIE milestone series ; v. MS 178.
Subjects:	Integrated circuits > Design and construction. Microlithography. Photolithography. Semiconductors > Etching.

Description
Item Description:	Contributions in English and German and Japanese with translations to English.
Physical Description:	xx, 875 pages : illustrations ; 29 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819451665