Selected papers on resolution enhancement techniques in optical lithography /

Bibliographic Details
Other Authors:	Schellenberg, F. M., 1959-
Format:	Book
Language:	English German Japanese
Published:	Bellingham, Wash. : SPIE Press, [2004]
Series:	SPIE milestone series ; v. MS 178.
Subjects:	Integrated circuits > Design and construction. Microlithography. Photolithography. Semiconductors > Etching.

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