APA (7th ed.) Citation

Schellenberg, F. M. (2004). Selected papers on resolution enhancement techniques in optical lithography. SPIE Press.

Chicago Style (17th ed.) Citation

Schellenberg, F. M. Selected Papers on Resolution Enhancement Techniques in Optical Lithography. Bellingham, Wash.: SPIE Press, 2004.

MLA (9th ed.) Citation

Schellenberg, F. M. Selected Papers on Resolution Enhancement Techniques in Optical Lithography. SPIE Press, 2004.