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Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia)
Other Authors: Chiao, Jung-Chih
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5276.
Subjects:
Microelectromechanical systems > Congresses.
Photon detectors > Design and construction > Congresses.
Photomechanical processes > Congresses.
Photolithography > Congresses.
Description
Item Description:Earlier conferences have title: Device and process technologies for MEMS and microelectronics.
Physical Description:xxxiv, 566 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081945169X