Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia)
Other Authors:	Chiao, Jung-Chih
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5276.
Subjects:	Microelectromechanical systems > Congresses. Photon detectors > Design and construction > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses.

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