APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia), & Chiao, J. (2004). Device and process technologies for MEMS, microelectronics, and photonics III: 10-12 December 2003, Perth, Australia. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, University of Western Australia, Defence Science and Technology Organisation (Australia), and Jung-Chih Chiao. Device and Process Technologies for MEMS, Microelectronics, and Photonics III: 10-12 December 2003, Perth, Australia. Bellingham, Washington: SPIE, 2004.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Device and Process Technologies for MEMS, Microelectronics, and Photonics III: 10-12 December 2003, Perth, Australia. SPIE, 2004.