Micromechanics and nanoscale effects : MEMS, multi-scale matrials [as printed] and micro-flows /

Bibliographic Details

Other Authors:	Harik, Vasyl Michael, Luo, Li-Shi
Format:	Book
Language:	English
Published:	Dordrecht ; Boston : Kluwer Academic, [2004]
Series:	ICASE/LaRC interdisciplinary series in science and engineering ; v. 10.
Subjects:	Microelectronics. Microelectromechanical systems. Actuators.