Fundamental electron interactions with plasma processing gases /

Bibliographic Details

Main Author:	Christophorou, L. G.
Other Authors:	Olthoff, James Kenneth, 1958-
Format:	Book
Language:	English
Published:	New York : Kluwer Academic/Plenum Publishers, [2004]
Series:	Physics of atoms and molecules.
Subjects:	Electron-molecule collisions. Plasma (Ionized gases)