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Alternative lithography : unleashing the potentials of nanotechnology /

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Bibliographic Details
Other Authors:	Sotomayor Torres, C. M.
Format:	Book
Language:	English
Published:	New York : Kluwer Academic/Plenum, [2003]
Series:	Nanostructure science and technology.
Subjects:	Molecular electronics. Microlithography. Nanotechnology.

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