Alternative lithography : unleashing the potentials of nanotechnology /

Bibliographic Details

Other Authors:	Sotomayor Torres, C. M.
Format:	Book
Language:	English
Published:	New York : Kluwer Academic/Plenum, [2003]
Series:	Nanostructure science and technology.
Subjects:	Molecular electronics. Microlithography. Nanotechnology.