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Alternative lithography : unleashing the potentials of nanotechnology /

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Bibliographic Details
Other Authors: Sotomayor Torres, C. M.
Format: Book
Language:English
Published: New York : Kluwer Academic/Plenum, [2003]
Series:Nanostructure science and technology.
Subjects:
Molecular electronics.
Microlithography.
Nanotechnology.
Description
Physical Description:xx, 333 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0306478587