Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 /
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Melville, N.Y. :
American Institute of Physics,
2003.
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| Series: | AIP conference proceedings ;
no. 683. |
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| Item Description: | "The 2003 International Conference on Characterization and Metrology for ULSI Technology was held at the J.J. Pickle Research Campus, University of Texas, Austin, TX, from March 24 through March 28, 2003"--pref. Accompanying computer disc contains full text from the book. |
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| Physical Description: | xviii, 818 pages : illustrations ; 28 cm. + 1 CD-ROM (4 3/4 in.) |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0735401527 (set) |