Characterization and metrology for ULSI technology : 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003 /

Bibliographic Details
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Book
Language:	English
Published:	Melville, N.Y. : American Institute of Physics, 2003.
Series:	AIP conference proceedings ; no. 683.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

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