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Microsystems engineering : metrology and inspection III : 23-25 June 2003, Munich, Germany /

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Bibliographic Details
Corporate Authors: European Optical Society, Wissenschaftliche Gesellschaft Lasertechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Gorecki, Christophe
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5145.
Subjects:
Quality control > Optical methods > Congresses.
Optical detectors > Industrial applications > Congresses.
Microelectronics > Congresses.
Microelectromechanical systems > Congresses.
Interferometry > Congresses.
Measurement > Congresses.

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Call Number: TS156.2 .M53 2003
 
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TS156.2 .M53 2003 Available