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ULSI semiconductor technology atlas /

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Bibliographic Details
Main Author: Tung, Chih-Hang, 1963-
Other Authors: Sheng, George T. T., Lu, Chih-Yuan, 1950-
Format: Book
Language:English
Published: Hoboken, N.J. : Wiley-Interscience, [2003]
Subjects:
Integrated circuits > Ultra large scale integration > Atlases.
Electron microscopy.
Description
Physical Description:xii, 666 pages : illustrations ; 27 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471457728 (cloth)
9780471457725 (cloth)