ULSI semiconductor technology atlas /

Bibliographic Details
Main Author:	Tung, Chih-Hang, 1963-
Other Authors:	Sheng, George T. T., Lu, Chih-Yuan, 1950-
Format:	Book
Language:	English
Published:	Hoboken, N.J. : Wiley-Interscience, [2003]
Subjects:	Integrated circuits > Ultra large scale integration > Atlases. Electron microscopy.

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