IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.

Bibliographic Details

Uniform Title:	IEEE transactions on semiconductor manufacturing (Online)
Corporate Authors:	IEEE Components, Hybrids, and Manufacturing Technology Society, IEEE Electron Devices Society, IEEE Reliability Society, IEEE Solid-State Circuits Council, Institute of Electrical and Electronics Engineers
Format:	Journal
Language:	English
Published:	New York, N.Y. : Institute of Electrical and Electronics Engineers, [1988-]
Subjects:	Semiconductors > Design and construction > Periodicals.
Online Availability: