Testing, reliability, and application of micro- and nano-material systems : 3-5 March, 2003, San Diego, California /

Bibliographic Details
Corporate Authors:	National Institute of Standards and Technology (U.S.), Institute of Acoustic Microscopy (U.S.), Society of Photo-optical Instrumentation Engineers
Other Authors:	Meyendorf, Norbert, Baaklini, George Y., Michel, Bernd
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2003]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5045.
Subjects:	Electrooptical devices > Materials > Testing > Congresses. Photonics > Materials > Testing > Congresses. Nanostructured materials > Testing > Congresses. Microelectromechanical systems > Testing > Congresses.

Description
Physical Description:	ix, 276 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819448508