Testing, reliability, and application of micro- and nano-material systems : 3-5 March, 2003, San Diego, California /

Bibliographic Details
Corporate Authors:	National Institute of Standards and Technology (U.S.), Institute of Acoustic Microscopy (U.S.), Society of Photo-optical Instrumentation Engineers
Other Authors:	Meyendorf, Norbert, Baaklini, George Y., Michel, Bernd
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2003]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5045.
Subjects:	Electrooptical devices > Materials > Testing > Congresses. Photonics > Materials > Testing > Congresses. Nanostructured materials > Testing > Congresses. Microelectromechanical systems > Testing > Congresses.

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