CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on CMOS Front-End Materials and Process Technology
Other Authors:	Liu, Tsu-Jae King
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2003]
Series:	Materials Research Society symposia proceedings ; v. 765.
Subjects:	Metal oxide semiconductors > Materials > Congresses. Metal oxide semiconductors, Complementary > Materials > Congresses. Nanostructured materials > Congresses. Gate array circuits > Materials > Congresses. Dielectrics > Congresses.

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