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Modelling of microfabrication systems /

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Bibliographic Details
Main Author: Nassar, Raja
Other Authors: Dai, Weizhong, 1962-
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2003]
Series:Microtechnology and MEMS.
Subjects:
Microelectronics > Mathematical models.
Integrated circuits > Mathematical models.
Microelectromechanical systems > Mathematical models.
Description
Physical Description:x, 269 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references (pages [249]-261) and index.
ISBN:3540002529 (alk. paper)
ISSN:1615-8326