Modelling of microfabrication systems /

Bibliographic Details
Main Author:	Nassar, Raja
Other Authors:	Dai, Weizhong, 1962-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2003]
Series:	Microtechnology and MEMS.
Subjects:	Microelectronics > Mathematical models. Integrated circuits > Mathematical models. Microelectromechanical systems > Mathematical models.

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