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Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors: Symposium F, "Chemical-Mechanical Planarization" San Francisco, Calif., Materials Research Society. Fall Meeting
Other Authors: Boning, Duane S.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2003]
Series:Materials Research Society symposia proceedings ; v. 767.
Subjects:
Microelectronics > Materials > Congresses.
Grinding and polishing > Congresses.
Metals > Pickling > Congresses.
Semiconductors > Surfaces > Congresses.
Description
Item Description:"The papers in this proceedings were presented at Symposium F, 'Chemical-Mechanical Planarization,' held April 22-24 at the 2003 MRS Spring Meeting in San Francisco, California ..."--P. xi.
Physical Description:xi, 348 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558997040