Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Symposium F, "Chemical-Mechanical Planarization" San Francisco, Calif., Materials Research Society. Fall Meeting
Other Authors:	Boning, Duane S.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2003]
Series:	Materials Research Society symposia proceedings ; v. 767.
Subjects:	Microelectronics > Materials > Congresses. Grinding and polishing > Congresses. Metals > Pickling > Congresses. Semiconductors > Surfaces > Congresses.

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