Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.

Bibliographic Details

Uniform Title:	Journal of microelectromechanical systems (Online)
Corporate Authors:	Institute of Electrical and Electronics Engineers, American Society of Mechanical Engineers
Format:	Journal
Language:	English
Published:	New York, NY : Institute of Electrical and Electronics Engineers, [1992-]
Subjects:	Microelectromechanical systems > Periodicals.
Online Availability: