Low energy ion assisted film growth /

Bibliographic Details
Main Author:	González-Elipe, A. R.
Other Authors:	Yubero, F., Sanz, J. M. (José María)
Format:	Book
Language:	English
Published:	London : Imperial College Press ; [2003]
Subjects:	Thin films > Design and construction. Thin films > Effect of radiation on. Ion bombardment.

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