Residual stress and self-assembly during deposition and etching of MEMS /

General relations are provided for the work rate and complementary work rate on a body containing evolving boundaries, residual stresses, and stresses due to boundary tractions. Closed-form solutions are provided for three simple examples with no residual stresses. Residual stresses are investigated...

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Bibliographic Details

Main Author:	Mani, Sathyanarayanan
Format:	Thesis eBook
Language:	English
Published:	[Place of publication not identified] : [publisher not identified] ; 2002.
Subjects:	Major aerospace engineering.
Online Access:	Link to OAKTrust copy